Two-polymer microtransfer molding for highly layered microstructures

被引:42
作者
Lee, JH [1 ]
Kim, CH
Ho, KM
Constant, K
机构
[1] Iowa State Univ Sci & Technol, Dept Phys & Astron, Ames Lab, US DOE, Ames, IA 50011 USA
[2] Iowa State Univ Sci & Technol, Dept Mat Sci & Engn, Ames, IA 50011 USA
关键词
D O I
10.1002/adma.200500721
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Two-polymer microtransfer molding (2P-mu TM), an advanced microtransfer molding technique, is developed for fabrication of 3D microstructures. The use of two different photocurable prepolymers and a simple and robust filling and coating method allows an extremely high yield in layer-by-layer microfabrication able to produce highly layered microstructures with high structural fidelity (see Figure).
引用
收藏
页码:2481 / +
页数:6
相关论文
共 20 条
[1]   Nanoimprinting over topography and multilayer three-dimensional printing [J].
Bao, LR ;
Cheng, X ;
Huang, XD ;
Guo, LJ ;
Pang, SW ;
Yee, AF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06) :2881-2886
[2]   An integrated nanoliter DNA analysis device [J].
Burns, MA ;
Johnson, BN ;
Brahmasandra, SN ;
Handique, K ;
Webster, JR ;
Krishnan, M ;
Sammarco, TS ;
Man, PM ;
Jones, D ;
Heldsinger, D ;
Mastrangelo, CH ;
Burke, DT .
SCIENCE, 1998, 282 (5388) :484-487
[3]   Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].
Campbell, M ;
Sharp, DN ;
Harrison, MT ;
Denning, RG ;
Turberfield, AJ .
NATURE, 2000, 404 (6773) :53-56
[4]   Advances in polymer integrated optics [J].
Eldada, L ;
Shacklette, LW .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2000, 6 (01) :54-68
[5]   Scaffold design and fabrication technologies for engineering tissues - state of the art and future perspectives [J].
Hutmacher, DW .
JOURNAL OF BIOMATERIALS SCIENCE-POLYMER EDITION, 2001, 12 (01) :107-124
[6]  
Joannopoulos J. D., 2008, Molding the flow of light
[7]   FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING [J].
KUMAR, A ;
WHITESIDES, GM .
APPLIED PHYSICS LETTERS, 1993, 63 (14) :2002-2004
[8]   Osseointegration of a hydroxyapatite-coated multilayered mesh stem [J].
Kusakabe, H ;
Sakamaki, T ;
Nihei, K ;
Oyama, Y ;
Yanagimoto, S ;
Ichimiya, M ;
Kimura, J ;
Toyama, Y .
BIOMATERIALS, 2004, 25 (15) :2957-2969
[9]   Diffracted moire fringes as analysis and alignment tools for multilayer fabrication in soft lithography [J].
Lee, JH ;
Kim, CH ;
Kim, YS ;
Ho, KM ;
Constant, K ;
Leung, W ;
Oh, CH .
APPLIED PHYSICS LETTERS, 2005, 86 (20) :1-3
[10]   Fabrication of photonic band gap crystal using microtransfer molded templates [J].
Leung, WY ;
Kang, H ;
Constant, K ;
Cann, D ;
Kim, CH ;
Biswas, R ;
Sigalas, MM ;
Ho, KM .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (10) :5866-5870