Drawing and observation of electrified images on ceramic substrates using electron beam

被引:6
作者
Fudouzi, H
Egashira, M
Shinya, N
机构
[1] Natl Research Inst for Metals, Ibaraki
关键词
powder particles' assembly; electron beam; electrification; voltage contrast; decay; calcium titanium oxide;
D O I
10.2109/jcersj.104.556
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Main process of the powder particles' assembly, proposed for creation of multi-functional materials, consists of drawing electrified patterns on substrates and introducing electrified powder particles onto the substrates, In the process, the powder particles are arranged along with the patterns by electrostatic force, In the present paper, electrification behaviors on ceramic substrates was studied. Electrified images were formed on calcium titanium oxide (CaTiO3) substrates using electron beam. The substrates were positively electrified by 1 kV electron beam, while the substrates were negatively electrified by electron beams with 3 kV and higher voltages, Electrified images were observed by the voltage contrast method using 2 kV electron beam scanning, Sharpness of electrified images were influenced by the condition of electron exposure, Sharp images were obtained by the electron beams with dose electron density of 0.2 pC/mu m(2) and accelerating voltage of 5-15 kV, The electrified images disappeared after Ih in air, but were maintained for 62h in vacuum.
引用
收藏
页码:556 / 561
页数:6
相关论文
共 9 条
[1]   CLASSICAL ELECTRON TRAJECTORY IN SCANNING ELECTRON-MICROSCOPE MIRROR-IMAGE METHOD [J].
CHEN, H ;
GONG, H ;
ONG, CK .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (02) :806-809
[2]   STORAGE AND EXAMINATION OF HIGH-RESOLUTION CHARGE IMAGES IN TEFLON FOILS [J].
FEDER, J .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (05) :1741-1745
[3]  
Ikeda S., 1987, Oyo Buturi, V56, P97
[4]   SECONDARY-ELECTRON EMISSION IN THE SCANNING ELECTRON-MICROSCOPE [J].
SEILER, H .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :R1-R18
[5]  
SHINYA N, 1994, 2 INT C INT MAT, P1142
[6]   CONTACT ELECTRIFICATION USING FORCE MICROSCOPY [J].
TERRIS, BD ;
STERN, JE ;
RUGAR, D ;
MAMIN, HJ .
PHYSICAL REVIEW LETTERS, 1989, 63 (24) :2669-2672
[7]  
THORNTON PR, 1968, SCANNING ELECT MICRO
[8]  
URA K, 1989, OYO BUTURI, V58, P1158
[9]   SURFACE PROCESSES OCCURRING DURING BREAKDOWN OF HIGH-VOLTAGE DEVICES [J].
VIGOUROUX, JP ;
LEEDEACON, O ;
LEGRESSUS, C ;
JURET, C ;
BOIZIAU, C .
IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1983, 18 (03) :287-291