Intense visible photoluminescence in amorphous SiOx and SiOx:H firms prepared by evaporation

被引：84

作者：

Rinnert, H

Vergnat, M

Marchal, G

Burneau, A

机构：

[1] Univ Nancy 1, Phys Mat Lab, UMR CNRS 7556, F-54506 Vandoeuvre Nancy, France

[2] Univ Nancy 1, Lab Chim Phys Environm, UMR CNRS 7564, F-54506 Villers Les Nancy, France

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 24期

关键词：

D O I：

10.1063/1.121578

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Visible photoluminescence (PL) can be observed in a-SiOx and a-SiOx:H alloys prepared by evaporation of SiO in ultrahigh Vacuum and under a flow of hydrogen ions, respectively. The hydrogen and oxygen bonding is studied by infrared spectrometry. The hydrogen stability is followed by thermal desorption spectrometry experiments. The evolution of the PL with annealing treatments shows that the PL can be attributed to a quantum confinement effect in a-Si clusters embedded in the matrix of n-SiOx,. Hydrogen does not greatly contribute to the PL efficiency and to the thermal evolution of the a-Si clusters. (C) 1998 American Institute of Physics.

引用

页码：3157 / 3159

页数：3

共 16 条

[11]

SULLIVAN BT, 1996, APPL PHYS LETT, V69, P3151

[12] VISIBLE PHOTOLUMINESCENCE FROM SIOX FILMS GROWN BY LOW-TEMPERATURE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION [J].