Positron-annihilation investigation of vacancy agglomeration in electron-irradiated float-zone silicon

被引:29
作者
Avalos, V
Dannefaer, S
机构
[1] Department of Physics, University of Winnipeg, Winnipeg, MB
来源
PHYSICAL REVIEW B | 1996年 / 54卷 / 03期
关键词
D O I
10.1103/PhysRevB.54.1724
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Positron-annihilation experiments which combine lifetime and Doppler broadening measurements have been done on 10-MeV electron-irradiated float-zone silicon. After irradiation, a lifetime of 305 ps is observed at 300 K, decreasing to 290 ps at 30 K, and the positron trapping rate decreases strongly with increasing temperature. The Doppler measurements yield, when coupled with lifetime data, a defect S value 6.7% larger than that for the bulk which is nearly twice the value hitherto claimed for divacancies. Isochronal annealing of the 1.8-mu m infrared absorption band is accompanied by a significant change in the defect S value to 3.8% larger than for the bulk. Surprisingly, the trapping rate at 50 K decreases only by 20% during the annealing out of the 1.8-mu m infrared absorption, and the positron lifetime stays essentially constant. Loose vacancy complexes (a ''sponge'' defect) consisting of discernible monovacancies are suggested to be formed upon annealing as an intermediate step in the clustering of vacancies.
引用
收藏
页码:1724 / 1728
页数:5
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