Low-voltage hot electrons and soft-programming lifetime prediction in nonvolatile memory cells

被引:24
作者
Ghetti, A
Selmi, L
Bez, RT
机构
[1] Univ Bologna, Dept Elect, I-40136 Bologna, Italy
[2] Univ Udine, DIEGM, I-33100 Udine, Italy
[3] ST Microelect, Milan, Italy
关键词
charge injection; EPROM hot carriers; MOSFET's; reliability estimation;
D O I
10.1109/16.753703
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports experiments and Monte Carlo (MC) simulations of flash memory cells at the typical bias conditions of read operations (high V-GS and low V-DS) leading to the soft-programming phenomenon. Comparing experiments with simulations we first show that, differently from the previously reported ease of homogeneous injection experiments, efficient energy gain mechanisms must be invoked to explain the order of magnitude of gate (I-G) and substrate (I-B) currents at low voltage, Second, the voltage scaling behavior of the soft-programming lifetime is analyzed and the validity of usual extrapolation techniques to evaluate this parameter is addressed.
引用
收藏
页码:696 / 702
页数:7
相关论文
共 37 条
[21]   Monte Carlo simulation of low voltage hot carrier effects in non volatile memory cells [J].
Ghetti, A ;
Selmi, L ;
Bez, R ;
Sangiorgi, E .
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :379-382
[22]  
GHETTI A, 1994, INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST, P363, DOI 10.1109/IEDM.1994.383391
[23]   SUBSTRATE CURRENT AT CRYOGENIC TEMPERATURES - MEASUREMENTS AND A TWO-DIMENSIONAL MODEL FOR CMOS TECHNOLOGY [J].
HENNING, AK ;
CHAN, NN ;
WATT, JT ;
PLUMMER, JD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (01) :64-74
[24]   COUPLED MONTE CARLO-DRIFT DIFFUSION ANALYSIS OF HOT-ELECTRON EFFECTS IN MOSFETS [J].
HIGMAN, JM ;
HESS, K ;
HWANG, CG ;
DUTTON, RW .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (05) :930-937
[25]   HOT-ELECTRON-INDUCED MOSFET DEGRADATION - MODEL, MONITOR, AND IMPROVEMENT [J].
HU, CM ;
TAM, SC ;
HSU, FC ;
KO, PK ;
CHAN, TY ;
TERRILL, KW .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (02) :375-385
[26]   On the accuracy and efficiency of substrate current calculations for sub-mu m n-MOSFET's [J].
Jungemann, C ;
Yamaguchi, S ;
Goto, H .
IEEE ELECTRON DEVICE LETTERS, 1996, 17 (10) :464-466
[27]   EXACT SOLUTION OF THE SCHRODINGER-EQUATION ACROSS AN ARBITRARY ONE-DIMENSIONAL PIECEWISE-LINEAR POTENTIAL BARRIER [J].
LUI, WW ;
FUKUMA, M .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (05) :1555-1559
[28]   HOT-ELECTRONS IN ONE DIMENSION [J].
MAHAN, GD .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (06) :2242-2251
[29]  
MASTRAPASQUA M, 1994, P INT WORKSH VLSI PR, P125
[30]  
Ricco B., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P92