共 15 条
[1]
ION-BOMBARDMENT OF RESISTS
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,
1983, 209 (MAY)
:79-86
[2]
INVESTIGATION OF HEAVY-ION PRODUCED DEFECT STRUCTURES IN INSULATORS BY SMALL-ANGLE SCATTERING
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1985, 37 (01)
:37-46
[3]
HYDROGEN PROFILING AND THE STOICHIOMETRY OF AN A-SINX-H FILM
[J].
VACUUM,
1995, 46 (03)
:265-267