Ferroelectric Na0.5K0.5NbO3 thin films by pulsed laser deposition

被引:8
作者
Cho, CR [1 ]
Grishin, A
Moon, BM
机构
[1] Royal Inst Technol, Dept Condensed Matter Phys, SE-10044 Stockholm, Sweden
[2] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea
关键词
preferential orientation; self-assembling; low loss; MFIS-diode;
D O I
10.1080/10584580008215638
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Highly c-axis oriented single phase Na0.5K0.5NbO3 (NKN) thin films have been deposited onto polycrystalline Pt80Ir20 substrates and SiO2/Si(001) wafers using pulsed laser ablation of stoichiometric ceramic target. Strong self-assembling of NKN films along the [001] direction has been observed. Properties of NKN/Pt thin film structures have been successfully tailored by oxygen pressure control from the ferroelectric state, characterized by the remnant polarization of 12 muC/cm(2), dielectric constant epsilon similar to 520 and tan delta - 0.024 @ 100 kHz, to superparaelectric state with tan delta as low as 0.003 and epsilon = 210 with very small 1.7% dispersion in the frequency domain 0.4-100 kHz and less than 10% Variation in the temperature range 77-415 K. NKN films grown onto SiO2/Si(001) substrates show quadrupled super-lattice structure along c-axis, loss tan delta less than 0.01, and epsilon similar to 110 @ 1 MHz. C-V measure ments for Au/NKN(270nm)/SiO2/Si MFIS-diode structure yield memory window of 3.26 V at the programmable voltage of 8 V.
引用
收藏
页码:35 / 45
页数:11
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