Femtosecond-laser-assisted chemical vapor deposition of cr metal

被引:3
作者
Hitosugi, T [1 ]
Mizuno, T [1 ]
机构
[1] Sony Corp, Micro Syst Network Co, Core Technol Dev Grp, Shinagawa Ku, Tokyo 1410001, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2005年 / 44卷 / 16-19期
关键词
femtosecond laser; chemical vapor deposition; CVD; numerical aperture; deposition; thin film;
D O I
10.1143/JJAP.44.L596
中图分类号
O59 [应用物理学];
学科分类号
摘要
Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)(6) on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.
引用
收藏
页码:L596 / L598
页数:3
相关论文
共 12 条
[1]  
EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[2]   DEPOSITION OF REFRACTORY-METAL FILMS BY RARE-GAS HALIDE LASER PHOTODISSOCIATION OF METAL-CARBONYLS [J].
FLYNN, DK ;
STEINFELD, JI ;
SETHI, DS .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (11) :3914-3917
[3]   Metal deposition with femtosecond light pulses at atmospheric pressure [J].
Haight, R ;
Longo, P ;
Wagner, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (03) :649-652
[4]   MARS: Femtosecond laser mask advanced repair system in manufacturing [J].
Haight, R ;
Hayden, D ;
Longo, P ;
Neary, T ;
Wagner, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06) :3137-3143
[5]  
Hecht E., 1997, OPTICS
[6]   CONTINUOUS WAVE VISIBLE LASER ASSISTED DECOMPOSITION OF CR(CO)6 ON A GROWING FILM - INSITU OBSERVATIONS [J].
HOULE, FA ;
YEH, LI .
JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (06) :2691-2699
[7]   DEPOSITION OF MOLYBDENUM AND TUNGSTEN FILMS FROM VAPOR DECOMPOSITION OF CARBONYLS [J].
KAPLAN, LH ;
DHEURLE, FM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (05) :693-&
[8]   ELECTRON-BEAM INDUCED SURFACE NUCLEATION AND LOW-TEMPERATURE DECOMPOSITION OF METAL-CARBONYLS [J].
KUNZ, RR ;
MAYER, TM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (05) :1557-1564
[9]   DEPOSITION OF CHROMIUM FILMS BY MULTI-PHOTON DISSOCIATION OF CHROMIUM HEXACARBONYL [J].
MAYER, TM ;
FISANICK, GJ ;
EICHELBERGER, TS .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) :8462-8469
[10]   LASER PHOTODEPOSITION OF REFRACTORY-METALS [J].
SOLANKI, R ;
BOYER, PK ;
MAHAN, JE ;
COLLINS, GJ .
APPLIED PHYSICS LETTERS, 1981, 38 (07) :572-574