共 51 条
[6]
Exploring the manufacturability of using block copolymers as resist materials in conjunction with advanced lithographic tools
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2007, 25 (06)
:1969-1975
[10]
Binary blends of diblock copolymers as an effective route to multiple length scales in perfect directed self-assembly of diblock copolymer thin films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2006, 24 (01)
:340-344