Facile fabrication of all-SWNT field-effect transistors

被引:11
作者
Aikawa, Shinya [1 ,2 ]
Xiang, Rong [1 ]
Einarsson, Erik [1 ,3 ]
Chiashi, Shohei [1 ]
Shiomi, Junichiro [1 ]
Nishikawa, Eiichi [2 ]
Maruyama, Shigeo [1 ]
机构
[1] Univ Tokyo, Dept Mech Engn, Bunkyo Ku, Tokyo 1138656, Japan
[2] Tokyo Univ Sci, Dept Elect Engn, Shinjuku Ku, Tokyo 1628601, Japan
[3] Univ Tokyo, Global Ctr Excellence Mech Syst Innovat, Bunkyo Ku, Tokyo 1138656, Japan
关键词
Single-walled carbon nanotube; field-effect transistor; patterned synthesis; self-assembled monolayer; Schottky barrier; interfacial dipole; WALLED CARBON NANOTUBES; RANDOM NETWORKS; SINGLE; GROWTH; DEPOSITION; ARCHITECTURE; METAL;
D O I
10.1007/s12274-011-0114-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Field-effect transistors (FETs) have been fabricated using as-grown single-walled carbon nanotubes (SWNTs) for the channel as well as both source and drain electrodes. The underlying Si substrate was employed as the back-gate electrode. Fabrication consisted of patterned catalyst deposition by surface modification followed by dip-coating and synthesis of SWNTs by alcohol chemical vapor deposition (CVD). The electrodes and channel were grown simultaneously in one CVD process. The resulting FETs exhibited excellent performance, with an I (ON)/I (OFF) ratio of 10(6) and a maximum ON-state current (I (ON)) exceeding 13 mu A. The large I (ON) is attributed to SWNT bundles connecting the SWNT channel with the SWNT electrodes. Bundling creates a large contact area, which results in a small contact resistance despite the presence of Schottky barriers at metallic-semiconducting interfaces. The approach described here demonstrates a significant step toward the realization of metal-free electronics.
引用
收藏
页码:580 / 588
页数:9
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