Interlocking mechanism for the fabrication of closed single-walled semiconductor microtubes

被引：13

作者：

Mendach, S

Kipp, T

Welsch, H

Heyn, C

Hansen, W

机构：

[1] Univ Hamburg, Inst Angew Phys, D-20355 Hamburg, Germany

[2] Univ Hamburg, Zentrum Mikrostrukturforsch, D-20355 Hamburg, Germany

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2005年 / 20卷 / 05期

关键词：

D O I：

10.1088/0268-1242/20/5/013

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We introduce a method to realize closed single-walled semiconductor microtubes. By applying a novel interlocking mechanism to the method of self-rolling strained bilayers we are able to fabricate closed InGaAs/GaAs-microtubes with precisely tuneable parameters. Such 3D objects are promising candidates for the realization of different kinds of free-standing optical resonators.

引用

收藏

页码：402 / 405

页数：4

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