共 26 条
[16]
Scanning capacitance microscopy imaging of silicon metal-oxide-semiconductor field effect transistors
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (04)
:2034-2038
[19]
Levinshtein M.E., 1996, Handbook Series on Semiconductor Parameters, V1, P77
[20]
Direct comparison of two-dimensional dopant profiles by scanning capacitance microscopy with TSUPREM4 process simulation
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (01)
:344-348