Si-InAs heterojunction Esaki tunnel diodes with high current densities

被引:86
作者
Bjork, M. T. [1 ]
Schmid, H. [1 ]
Bessire, C. D. [1 ]
Moselund, K. E. [1 ]
Ghoneim, H. [1 ]
Karg, S. [1 ]
Lortscher, E. [1 ]
Riel, H. [1 ]
机构
[1] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland
关键词
NANOWIRE GROWTH;
D O I
10.1063/1.3499365
中图分类号
O59 [应用物理学];
学科分类号
摘要
Si-InAs heterojunction p-n diodes were fabricated by growing InAs nanowires in oxide mask openings on silicon substrates. At substrate doping concentrations of 1 x 10(16) and 1 x 10(19) cm(-3), conventional diode characteristics were obtained, from which a valence band offset between Si and InAs of 130 meV was extracted. For a substrate doping of 4 x 10(19) cm(-3), heterojunction tunnel diode characteristics were obtained showing current densities in the range of 50 kA/cm(2) at 0.5 V reverse bias. In addition, in situ doping of the InAs wires was performed using disilane to further boost the tunnel currents up to 100 kA/cm(2) at 0.5 V reverse bias for the highest doping ratios. (C) 2010 American Institute of Physics. [doi:10.1063/1.3499365]
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页数:3
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