Printable ultrathin substrates formed on a concave-convex underlayer for highly flexible membrane-type electrode stickers

被引:4
作者
Hwang, Youngkyu [1 ]
Cho, Hyun A. [1 ]
Kim, Suk Ho [1 ]
Jang, Hun Soo [1 ]
Hyun, Yujun [1 ]
Chun, Jae-Yi [1 ]
Park, Seong-Ju [1 ]
Ko, Heung Cho [1 ]
机构
[1] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, Kwangju 500712, South Korea
基金
新加坡国家研究基金会;
关键词
THIN-FILM TRANSISTORS; STAMP COLLAPSE; GRAPHENE FILMS; LARGE-AREA; SILICON; CIRCUITS; SOFT; SEMICONDUCTOR; LITHOGRAPHY; MECHANICS;
D O I
10.1039/c2sm25637a
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The ability to create printable ultrathin devices and transfer printing allows 'stick and play' electronics on unusual surfaces where direct device fabrication is not possible. This research describes a systematic method for using an additional handling substrate to mechanically support an ultrathin substrate and printing the final device on a target surface in a deterministic way. Introducing a sacrificial layer and a concave-convex structure with optimized depth, pitch, and shape at the interface between the two substrates provides both stability in device fabrication and high-yield transfer printing in a deterministic manner. To demonstrate the efficacy of this method, we successfully transferred various sizes and layouts of patterns onto various planar and curvilinear substrates. Finally, we demonstrate highly foldable and stretchable membrane-type electrodes that can be attached onto unusual surfaces, such as paper and elastic adhesive tape.
引用
收藏
页码:7598 / 7603
页数:6
相关论文
共 44 条
[1]   High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates [J].
Ahn, Se Hyun ;
Guo, L. Jay .
ADVANCED MATERIALS, 2008, 20 (11) :2044-+
[2]   Printable single-crystal silicon micro/nanoscale ribbons, platelets and bars generated from bulk wafers [J].
Baca, Alfred J. ;
Meitl, Matthew A. ;
Ko, Heung Cho ;
Mack, Shawn ;
Kim, Hoon-Sik ;
Dong, Jingyan ;
Ferreira, Placid M. ;
Rogers, John A. .
ADVANCED FUNCTIONAL MATERIALS, 2007, 17 (16) :3051-3062
[3]  
Bae S, 2010, NAT NANOTECHNOL, V5, P574, DOI [10.1038/nnano.2010.132, 10.1038/NNANO.2010.132]
[4]   Semiconductors turn soft: inorganic nanomembranes [J].
Cavallo, Francesca ;
Lagally, Max G. .
SOFT MATTER, 2010, 6 (03) :439-455
[5]   Strain engineering of epitaxially transferred, ultrathin layers of III-V semiconductor on insulator [J].
Fang, Hui ;
Madsen, Morten ;
Carraro, Carlo ;
Takei, Kuniharu ;
Kim, Ha Sul ;
Plis, Elena ;
Chen, Szu-Ying ;
Krishna, Sanjay ;
Chueh, Yu-Lun ;
Maboudian, Roya ;
Javey, Ali .
APPLIED PHYSICS LETTERS, 2011, 98 (01)
[6]   Competing fracture in kinetically controlled transfer printing [J].
Feng, Xue ;
Meitl, Matthew A. ;
Bowen, Audrey M. ;
Huang, Yonggang ;
Nuzzo, Ralph G. ;
Rogers, John A. .
LANGMUIR, 2007, 23 (25) :12555-12560
[7]   The path to ubiquitous and low-cost organic electronic appliances on plastic [J].
Forrest, SR .
NATURE, 2004, 428 (6986) :911-918
[8]   Stamp collapse in soft lithography [J].
Huang, YGY ;
Zhou, WX ;
Hsia, KJ ;
Menard, E ;
Park, JU ;
Rogers, JA ;
Alleyne, AG .
LANGMUIR, 2005, 21 (17) :8058-8068
[9]   Surface-free technology by laser annealing (SUFTLA) and its application to poly-Si TFT-LCDs on plastic film with integrated drivers [J].
Inoue, S ;
Utsunomiya, S ;
Saeki, T ;
Shimoda, T .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2002, 49 (08) :1353-1360
[10]   Transparent Electronics Based on Transfer Printed Aligned Carbon Nanotubes on Rigid and Flexible Substrates [J].
Ishikawa, Fumiaki N. ;
Chang, Hsiao-Kang ;
Ryu, Koungmin ;
Chen, Po-Chiang ;
Badmaev, Alexander ;
De Arco, Lewis Gomez ;
Shen, Guozhen ;
Zhou, Chongwu .
ACS NANO, 2009, 3 (01) :73-79