High-temperature tolerant diamond diode for carbon monoxide gas detection

被引：15

作者：

Gurbuz, Y ^{[1
]}

Kang, WP ^{[1
]}

Davidson, JL ^{[1
]}

Kerns, DV ^{[1
]}

机构：

[1] Vanderbilt Univ, Dept Elect & Comp Engn, Nashville, TN 37235 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1998年 / 84卷 / 12期

关键词：

D O I：

10.1063/1.368994

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A high-temperature tolerant microelectronic carbon monoxide gas sensor has been developed. This device is based on a diamond diode in the form of catalytic-metal/adsorptive-oxide/intrinsic-diamond/semiconductor-diamond structure. The gas sensing performance and detection mechanisms have been studied over a wide temperature range (50-500 degrees C). The gas sensitivity of the sensor is large, fast, repeatable, and reproducible. Gas detection mechanism is attributed to the modification of the oxygen vacancies in the SnOx layer of the sensor. This diamond diode sensor can be utilized in applications that require a sensor to operate at a wider operating temperature range. (C) 1998 American Institute of Physics. [S0021-8979(98)06624-9].

引用

页码：6935 / 6936

页数：2

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