Low-resistance and highly-reflective Zn-Ni solid solution/Ag ohmic contacts for flip-chip light-emitting diodes

被引:65
作者
Song, JO [1 ]
Leem, DS
Kwak, JS
Nam, OH
Park, Y
Seong, TY
机构
[1] Kwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea
[2] Samsung Adv Inst Technol, Photon Lab, Suwon 440600, South Korea
关键词
D O I
10.1063/1.1633992
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated a Zn-Ni solid solution/Ag scheme for use in producing high-quality ohmic contacts for flip-chip light-emitting diodes (LEDs). The as-deposited contact shows nonlinear I-V characteristics. However, oxidizing the contacts at temperatures of 350-550 degreesC for 1 min in air ambient results in linear I-V behaviors, yielding specific contact resistances of 10(-4)-10(-5) Omega cm(2). In addition, LEDs are fabricated with the oxidized Zn-Ni solid solution/Ag contacts and Ag single contacts. The typical I-V characteristics of the LEDs with the annealed Zn-Ni solid solution (2.5 nm)/Ag (200 nm) p-type contact layers reveal a forward-bias voltage of 3.25 V at an injection current of 20 mA, which is much better than that of the LEDs with the Ag (200 nm) contact layers. (C) 2003 American Institute of Physics.
引用
收藏
页码:4990 / 4992
页数:3
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