Direct detection in Transmission Electron Microscopy with a 5 μm pitch CMOS pixel sensor

被引：11

作者：

Contarato, Devis ^{[1
]}

Denes, Peter ^{[1
]}

Doering, Dionisio ^{[1
]}

Joseph, John ^{[1
]}

Krieger, Brad ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2011年 / 635卷 / 01期

关键词：

Monolithic active pixel sensors; Transmission Electron Microscopy;

D O I：

10.1016/j.nima.2011.01.087

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This paper presents the characterization of a CMOS monolithic pixel sensor prototype optimized for direct detection in Transmission Electron Microscopy (TEM). The sensor was manufactured in a deep-submicron commercial CMOS process and features pixels of 5 mu m pitch. Different pixel architectures have been implemented in the test chip, and the best performing architecture has been selected from a series of tests performed with 300 keV electrons. Irradiation tests to high electron doses have also been performed in order to estimate device lifetime. (C) 2011 Elsevier BM. All rights reserved.

引用

页码：69 / 73

页数：5

共 14 条

[1] A DAQ system for pixel detectors R&D [J].

Battaglia, M. ;

Bisello, D. ;

Contarato, D. ;

Giubilato, P. ;

Pantano, D. ;

Tessaro, M. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 611 (01) :105-110

[2] Characterisation of a CMOS active pixel sensor for use in the TEAM microscope [J].

Battaglia, Marco ;

Contarato, Devis ;

Denes, Peter ;

Doering, Dionisio ;

Duden, Thomas ;

Krieger, Brad ;

Giubilato, Piero ;

Gnani, Dario ;

Radmilovic, Velimir .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 622 (03) :669-677

[3] Cluster imaging with a direct detection CMOS pixel sensor in Transmission Electron Microscopy [J].

Battaglia, Marco ;

Contarato, Devis ;

Denes, Peter ;

Giubilato, Piero .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 608 (02) :363-365

[4] CMOS pixel sensor response to low energy electrons in transmission electron microscopy [J].

Battaglia, Marco ;

Contarato, Devis ;

Denes, Peter ;

Doering, Dionisio ;

Radmilovic, Velimir .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 605 (03) :350-352

[5] A rad-hard CMOS active pixel sensor for electron microscopy [J].

Battaglia, Marco ;

Contarato, Devis ;

Denes, Peter ;

Doering, Dionisio ;

Giubilato, Piero ;

Kim, Tae Sung ;

Mattiazzo, Serena ;

Radmilovic, Velimir ;

Zalusky, Sarah .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 598 (02) :642-649

[6]

Berger MJ, 2017, 124 NIST

[7]

DAHMEN U, MICROSC MICROANAL, V13

[8] Active Pixel Sensors for electron microscopy [J].

Denes, P. ;

Bussat, J.-M. ;

Lee, Z. ;

Radmillovic, V. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 579 (02) :891-894

[9] Direct electron imaging in electron microscopy with monolithic active pixel sensors [J].

Deptuch, G. ;

Besson, A. ;

Rehak, P. ;

Szelezniak, M. ;

Wall, J. ;

Winter, M. ;

Zhu, Y. .

ULTRAMICROSCOPY, 2007, 107 (08) :674-684

[10] Direct single electron detection with a CMOS detector for electron microscopy [J].

Faruqi, AR ;

Henderson, R ;

Pryddetch, M ;

Allport, P ;

Evans, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2005, 546 (1-2) :170-175

← 1 2 →