Cluster imaging with a direct detection CMOS pixel sensor in Transmission Electron Microscopy

被引：37

作者：

Battaglia, Marco ^{[1
,2
]}

Contarato, Devis ^{[1
]}

Denes, Peter ^{[1
]}

Giubilato, Piero ^{[1
,3
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[3] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2009年 / 608卷 / 02期

关键词：

Monolithic active pixel sensor; Transmission Electron Microscopy; SIMULATION;

D O I：

10.1016/j.nima.2009.07.017

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CIVICS sensor with 9.5 x 9.5 mu m(2) pixels show an improvement of a factor of two in point spread function to 2.7 mu m at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：363 / 365

页数：3

共 14 条

[1] GEANT4-a simulation toolkit [J].

Agostinelli, S ;

Allison, J ;

Amako, K ;

Apostolakis, J ;

Araujo, H ;

Arce, P ;

Asai, M ;

Axen, D ;

Banerjee, S ;

Barrand, G ;

Behner, F ;

Bellagamba, L ;

Boudreau, J ;

Broglia, L ;

Brunengo, A ;

Burkhardt, H ;

Chauvie, S ;

Chuma, J ;

Chytracek, R ;

Cooperman, G ;

Cosmo, G ;

Degtyarenko, P ;

Dell'Acqua, A ;

Depaola, G ;

Dietrich, D ;

Enami, R ;

Feliciello, A ;

Ferguson, C ;

Fesefeldt, H ;

Folger, G ;

Foppiano, F ;

Forti, A ;

Garelli, S ;

Giani, S ;

Giannitrapani, R ;

Gibin, D ;

Cadenas, JJG ;

González, I ;

Abril, GG ;

Greeniaus, G ;

Greiner, W ;

Grichine, V ;

Grossheim, A ;

Guatelli, S ;

Gumplinger, P ;

Hamatsu, R ;

Hashimoto, K ;

Hasui, H ;

Heikkinen, A ;

Howard, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2003, 506 (03) :250-303

[2]

BATTAGLIA M, NUCL INST A IN PRESS

[3] Response simulation of CMOS pixel sensors for the ILC vertex tracker [J].

Battaglia, Marco .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 572 (01) :274-276

[4] CMOS pixel sensor response to low energy electrons in transmission electron microscopy [J].

Battaglia, Marco ;

Contarato, Devis ;

Denes, Peter ;

Doering, Dionisio ;

Radmilovic, Velimir .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 605 (03) :350-352

[5] A rad-hard CMOS active pixel sensor for electron microscopy [J].

Battaglia, Marco ;

Contarato, Devis ;

Denes, Peter ;

Doering, Dionisio ;

Giubilato, Piero ;

Kim, Tae Sung ;

Mattiazzo, Serena ;

Radmilovic, Velimir ;

Zalusky, Sarah .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 598 (02) :642-649

[6]

CHAUVIE S, 2001, CHEP 01 COMP HIGH EN

[7]

Dahmen U., 2007, MICROSC MICROANAL, V13, P1150

[8] Active Pixel Sensors for electron microscopy [J].

Denes, P. ;

Bussat, J.-M. ;

Lee, Z. ;

Radmillovic, V. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 579 (02) :891-894

[9] Direct electron imaging in electron microscopy with monolithic active pixel sensors [J].

Deptuch, G. ;

Besson, A. ;

Rehak, P. ;

Szelezniak, M. ;

Wall, J. ;

Winter, M. ;

Zhu, Y. .

ULTRAMICROSCOPY, 2007, 107 (08) :674-684

[10] ASIC-based event-driven 2D digital electron counter for TEM imaging [J].

Fan, GY ;

Datte, P ;

Beuville, E ;

Beche, JF ;

Millaud, J ;

Downing, KH ;

Burkard, FT ;

Ellisman, MH ;

Xuong, NH .

ULTRAMICROSCOPY, 1998, 70 (03) :107-113

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