Recent Advances in Understanding the Bias Temperature Instability

被引：99

作者：

Grasser, T. ^{[1
]}

Kaczer, B. ^{[3
]}

Goes, W. ^{[1
]}

Reisinger, H. ^{[4
]}

Aichinger, Th. ^{[5
]}

Hehenberger, Ph. ^{[2
]}

Wagner, P. -J. ^{[1
]}

Schanovsky, F. ^{[2
]}

Franco, J. ^{[3
]}

Roussel, Ph. ^{[3
]}

Nelhiebel, M. ^{[4
]}

机构：

[1] TU Wien, Christian Doppler Lab TCAD, Vienna, Austria

[2] TU Wien, Inst Microelect, Vienna, Austria

[3] IMEC, Leuven, Belgium

[4] Infineon, Munich, Germany

[5] KAI, Vallach, Austria

来源：

2010 INTERNATIONAL ELECTRON DEVICES MEETING - TECHNICAL DIGEST | 2010年

关键词：

NBTI DEGRADATION; NOISE; RELAXATION; RECOMBINATION; KINETICS; MODEL; GAAS;

D O I：

10.1109/IEDM.2010.5703295

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Our understanding of the bias temperature instability (BTI) has been plagued by disagreements related to measurement issues. Although even in the early papers on BTI the existence of recovery was acknowledged and discussed [1, 2], for unknown reasons this had little impact on the way we used to think about the phenomenon until recently [3-7]. Even after the re-discovery of recovery [3], it took a few years until it was fully appreciated that any measurement scheme conceived so far considerably interferes with the degradation it is supposed to measure, often accelerating its recovery. Nonetheless, this experimental nuisance has led researchers to think in more detail about the problem and has thus opened the floodgates for fresh ideas [6-11]. Some of these ideas together with the experimental data supporting them are reviewed in the following.

引用

页数：4

共 45 条

[1] Impact of Hydrogen on Recoverable and Permanent Damage following Negative Bias Temperature Stress [J].