Electroless Ni plating on n- and p-type porous Si for ohmic and rectifying contacts

被引:27
作者
Dhar, S
Chakrabarti, S
机构
[1] Department of Electronic Science, Calcutta University, Calcutta-700009, 92, APC Road
关键词
D O I
10.1088/0268-1242/11/8/020
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The properties of electrical contacts made on porous Si by the electroless Ni plating technique have been studied. It is shown that due to the pore infiltration property of the plating solution, metallization occurs inside the pores over an effective area several times higher than the physical area of the sample. By making variations in the plating bath composition, Ni containing a small amount of P or B as an impurity is plated and excellent ohmic or rectifying contacts on n- or p-type porous Si are obtained. It is further observed that a higher area of contact with comparatively superior electrical properties is obtained when electroless Ni plating is made from the bath which introduces B as the impurity.
引用
收藏
页码:1231 / 1234
页数:4
相关论文
共 24 条
[21]   PHOTODETECTORS FABRICATED FROM RAPID-THERMAL-OXIDIZED POROUS SI [J].
TSAI, CC ;
LI, KH ;
CAMPBELL, JC ;
TASCH, A .
APPLIED PHYSICS LETTERS, 1993, 62 (22) :2818-2820
[22]  
XU J, 1994, IEEE ELECTRON DEVICE, V12, P507
[23]   FABRICATION OF MSM PHOTOCONDUCTOR ON POROUS SI USING MICROMACHINED SILICON MASK [J].
YU, LZ ;
WIE, CR .
ELECTRONICS LETTERS, 1992, 28 (10) :911-913
[24]   HIGHLY SENSITIVE PHOTODETECTOR USING POROUS SILICON [J].
ZHENG, JP ;
JIAO, KL ;
SHEN, WP ;
ANDERSON, WA ;
KWOK, HS .
APPLIED PHYSICS LETTERS, 1992, 61 (04) :459-461