Distribution of components in Ge-Si bulk single crystals grown under the continuous feeding of the melt with the second component (Si)

被引:27
作者
Azhdarov, GK [1 ]
Küçükömeroglu, T
Varilci, A
Altunbas, M
Kobya, A
Azhdarov, PG
机构
[1] Karadeniz Tech Univ, Fac Arts & Sci, Dept Phys, TR-61080 Trabzon, Turkey
[2] Azerbaijan Acad Sci, Inst Phys, Baku 370143, Azerbaijan
关键词
segregation; supply of solute elements; double crucible technique; growth from melt; single crystal growth; germanium silicon alloys;
D O I
10.1016/S0022-0248(01)01270-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A component distribution in Ge-rich Ge-Si single crystals grown under the continuous feeding of the melt with the second component (Si) has been analyzed theoretically and investigated experimentally with a view to establish the operational parameters and optimum processing conditions in preparing bulk crystals with a desired uniform and/or graded composition profiles. It was found that a numerical model can be successfully applied for estimating the macroscopic axial composition profiles in Ge-rich Ge-Si single crystals. A modified double crucible method was developed to grow graded and uniform Ge-Si bulk single crystals using the continuous feeding of the melt with a Si rod. The method for the growth of compositionally graded and uniform Ge-Si bulk single crystals from a starting pure Ge melt using a Ge seed followed with continuous feeding of the melt with a Si rod was used and considered. Two stages of the feeding rate of the melt were developed to increase a uniform portion of the crystals grown by this method. We were successful in growing compositionally graded and uniform Ge-Si single crystals with Si content up to 15 at% using theoretically established operational parameters (growth and feeding rates: a starting melt composition). The length and diameter of the crystals are 30-70 and 5-9 mm, respectively. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:437 / 442
页数:6
相关论文
共 18 条
[1]   Czochralski growth of Si- and Ge-rich SiGe single crystals [J].
Abrosimov, NV ;
Rossolenko, SN ;
Thieme, W ;
Gerhardt, A ;
Schroder, W .
JOURNAL OF CRYSTAL GROWTH, 1997, 174 (1-4) :182-186
[2]   Single crystal growth of Si1-xGex by the Czochralski technique [J].
Abrosimov, NV ;
Rossolenko, SN ;
Alex, V ;
Gerhardt, A ;
Schroder, W .
JOURNAL OF CRYSTAL GROWTH, 1996, 166 (1-4) :657-662
[3]  
Azhdarov PG, 1999, INORG MATER+, V35, P763
[4]   Germanium-rich SiGe bulk single crystals grown by the vertical Bridgman method and by zone melting [J].
Barz, A ;
Dold, P ;
Kerat, U ;
Recha, S ;
Benz, KW ;
Franz, M ;
Pressel, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (03) :1627-1630
[5]   Silicon-germanium bulk alloy growth by liquid encapsulated zone melting [J].
Bliss, D ;
Demczyk, B ;
Anselmo, A ;
Bailey, J .
JOURNAL OF CRYSTAL GROWTH, 1997, 174 (1-4) :187-193
[6]   BRIDGMAN AND CZOCHRALSKI GROWTH OF GE-SI ALLOY CRYSTALS [J].
DAHLEN, A ;
FATTAH, A ;
HANKE, G ;
KARTHAUS, E .
CRYSTAL RESEARCH AND TECHNOLOGY, 1994, 29 (02) :187-198
[7]   Growth and characterization of Ge1-xSix (x≤10at%) single crystals [J].
Dold, P ;
Barz, A ;
Recha, S ;
Pressel, K ;
Franz, M ;
Benz, KW .
JOURNAL OF CRYSTAL GROWTH, 1998, 192 (1-2) :125-135
[8]   A boundary layer model for macrosegregation of Bridgman grown Ge1-xSix mixed crystals [J].
Helmers, L ;
Schilz, J ;
Bahr, G .
JOURNAL OF CRYSTAL GROWTH, 1996, 165 (04) :381-386
[9]   Germanium-silicon single crystal growth using an encapsulant in a silica ampoule [J].
Kadokura, K ;
Takano, Y .
JOURNAL OF CRYSTAL GROWTH, 1997, 171 (1-2) :56-60
[10]   Growth of Ge-rich SixGe1-x single crystal with uniform composition (x=0.02) on a compositionally graded crystal for use as GaAs solar cells [J].
Nakajima, K ;
Kodama, S ;
Miyashita, S ;
Sazaki, G ;
Hiyamizu, S .
JOURNAL OF CRYSTAL GROWTH, 1999, 205 (03) :270-276