Atomically-resolved imaging by frequency-modulation atomic force microscopy using a quartz length-extension resonator

被引：42

作者：

An, TS

Eguchi, T

Akiyama, K

Hasegawa, Y

机构：

[1] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan

[2] Japan Sci & Technol Agcy, PRESTO, Kashiwa, Chiba 2778581, Japan

来源：

APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 13期

关键词：

D O I：

10.1063/1.2061850

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using a 1 MHz length-extension type of quartz resonator as a force sensor for frequency-modulation atomic force microscopy (AFM), atomically resolved images of the Si(111)-(7x7) surface was obtained. Fabrications of a tip attached at the front end of the resonator by focused ion beam, and removal of the native oxide layer on the tip by in-situ field ion microscopy are found effective for achieving the highly-resolved AFM imaging. (C) 2005 American Institute of Physics.

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页码：1 / 3

页数：3

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