Self-patterning of arrays of ferroelectric capacitors: description by theory of substrate mediated strain interactions

被引:46
作者
Dawber, M
Szafraniak, I
Alexe, M
Scott, JF
机构
[1] Univ Cambridge, Dept Earth Sci, Symetrix Ctr Ferroics, Cambridge CB2 3EQ, England
[2] Max Planck Inst Microstruct Phys, D-06120 Halle Saale, Germany
关键词
D O I
10.1088/0953-8984/15/44/L03
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Self-patterning presents an appealing alternative to lithography for the production of arrays of nanoscale ferroelectric capacitors for use in high density non-volatile memory devices. However current levels of registration achieved experimentally are far from adequate for this application. To provide a guide for experiment we have applied the theories developed for self-patterning of semiconductor nanocrystals to two self-patterning systems of potential interest for ferroelectric memory applications, metallic bismuth oxide on bismuth titanate and ferroelectric lead zirconate titanate on strontium titanate.
引用
收藏
页码:L667 / L671
页数:5
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