Synthesis of diamond using a low pressure, radio frequency, inductively coupled plasma

被引：4

作者：

Noda, H ^{[1
]}

Nagai, H ^{[1
]}

Shimakura, M ^{[1
]}

Hiramatsu, M ^{[1
]}

Nawata, M ^{[1
]}

机构：

[1] Meijo Univ, Dept Elect & Elect Engn, Tempa Ku, Nagoya, Aichi 4688502, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1998年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.581516

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Diamond was successfully synthesized using a low pressure, radio frequency (rf), inductively coupled plasma. A source mixture of methanol (CH3OH), hydrogen (H-2), and water vapor (H2O) was introduced into a-reaction chamber through a quartz tube of 12 mm inner diameter. A seven-turn rf coil was mounted on the quartz tube to produce high-density plasma. The Si substrate was located in a downstream region. Diamond formation was carried out with varying mixture ratio of source gases at total pressures of 70-140 mTorr. Diamond crystals exhibiting a well-defined 1332 cm(-1) diamond-Raman peak dan be formed using CH3OH//H-2/H2O mixtures at total pressures below 140 mTorr. (C) 1998 American Vacuum Society. [S0734-2101(98)05806-0].

引用

页码：3170 / 3174

页数：5

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