Study of oxidation and wear behaviors of (Nb,Cr)N thin films using Raman spectroscopy

被引：20

作者：

Hsieh, JH

Li, C

Tan, ALK

Poh, C

Tan, NJ

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

[2] Singapore Inst Mfg Technol, Singapore 638075, Singapore

[3] Inst Mat Res & Engn, Singapore 117602, Singapore

来源：

SURFACE & COATINGS TECHNOLOGY | 2004年 / 177卷

关键词：

oxidation; wear debris; (Nb; Cr)N coatings; Raman spectroscopy;

D O I：

10.1016/j.surfcoat.2003.09.008

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Several (Nb,Cr)N coatings were deposited by an unbalanced magnetron sputtering system. Following the deposition, the tribological properties of these coatings were studied using a ball-on-disk setup with alumina balls. The wear debris was then characterized using Raman spectroscopy to identify oxides generated during the wear process to gain a better understanding of tribochemical reactions. The results show that Cr2O3 and CrNbO4 constitute the debris obtained from Cr-rich coatings, while Nb2O5.nH(2)O is the major constituent of the debris formed on Nb-rich coatings. From the study of the debris, the difference in wear mechanism between Cr-rich and Nb-rich coatings is explained and confirmed. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：299 / 305

页数：7

共 12 条

[1] Raman microscopic studies of PVD hard coatings [J].