Piezoelectric properties of CaBi4Ti4O15 ferroelectric thin films investigated by atomic force microscopy

被引:14
作者
Fu, DS [1 ]
Suzuki, K [1 ]
Kato, K [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 9B期
关键词
piezoelectric; ferroelectric; atomic force microscopy (AFM); bismuth-layer-structured ferroelectric thin film;
D O I
10.1143/JJAP.42.5994
中图分类号
O59 [应用物理学];
学科分类号
摘要
Atomic force microscopy, (AFM) is used to probe the local piezoelectric properties of CaBi4Ti4O15 (CBT) bismuth-layerstructured ferroelectric thin films. Calibration with Z-cut LaTiO3 and X-cut quartz crystals shows that a conductive AFM tip can be employed as a top electrode to accurately evaluate the piezoelectric displacement in ferroelectric materials without a top electrode. Our measurements on individual grains in CBT film clearly reveal that the local piezoelectric properties are determined by the polarization state in the grain. In a grain with a polar axis very close to the normal direction, a piezoelectric coefficient of 16 pm/V was attained after poling.
引用
收藏
页码:5994 / 5997
页数:4
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