Optical detection for scanning microdeformation microscopy

被引：26

作者：

Cretin, B

Vairac, P

机构：

[1] Lab. Phys. Metrologie Oscillateurs, CNRS Associé, Univ. de Franche-Comte-Besancon, 25044 Besançon Cedex

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 15期

关键词：

D O I：

10.1063/1.119348

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Scanning microdeformation microscopy is a kind of ac contact force microscopy sensitive to the variations of the local elastic constants of the investigated material. In this letter a new optical interferometer designed for detecting the small displacement of the cantilever is reported. The setup is described and some applications of the laser probe to scanning microdeformation microscopy are demonstrated. (C) 1997 American Institute of Physics.

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页码：2082 / 2084

页数：3

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