Compact wavelength-selective functions in silicon-on-insulator photonic wires

被引:277
作者
Bogaerts, Wim [1 ]
Dumon, Pieter
Van Thourhout, Dries
Taillaert, Dirk
Jaenen, Patrick
Wouters, Johan
Beckx, Stephan
Wiaux, Vincent
Baets, Roel G.
机构
[1] Univ Ghent, Interuniv Microelect Ctr, Dept Informat Technol, B-9000 Ghent, Belgium
[2] Interuniv Microelet Ctr vzw, Silicon Proc Technol Div, B-3001 Louvain, Belgium
关键词
arrayed waveguide grating (AWG); nanophotonics; photonic wire; ring resonator; silicon-on-insulator (SOI);
D O I
10.1109/JSTQE.2006.884088
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a number of compact wavelength-selective elements implemented in silicon-on-insulator (SOI) photonic wires. These include arrayed waveguide gratings (AWGs), Mach-Zehnder lattice filters (MZLFs), and ring resonators. The circuits were fabricated with deep UV lithography. We also address the sensitivity of photonic wires to phase noise by selectively broadening the waveguides, and demonstrate this in a compact AWG with -20 dB crosstalk and an insertion loss of 2.2 dB for the center channels.
引用
收藏
页码:1394 / 1401
页数:8
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