Focused ion beam-induced fabrication of tungsten structures

被引：64

作者：

Ishida, M

Fujita, J

Ichihashi, T

Ochiai, Y

Kaito, T

Matsui, S

机构：

[1] NEC Fundamental Res Labs, Tsukuba, Ibaraki 3058501, Japan

[2] Japan Sci & Technol Corp, JST, Tsukuba, Ibaraki 3058501, Japan

[3] Seiko Instruments Inc, Oyama, Shizuoka 4101393, Japan

[4] Himeji Inst Technol, Himeji, Hyogo 6781201, Japan

[5] Japan Sci & Technol Corp, JST, Kamigori, Hyogo 6781201, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 06期

关键词：

D O I：

10.1116/1.1627806

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sidewall morphology on three-dimensional (313) tungsten structures grown with focused ion beam-induced chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)(6)] was improved with a milling process by using FIB treatment subsequent to growth. As a result, Young's modulus was measured at 300 GPa at maximum and density was measured at 13.0 x 10(3) kg/m(3). Young's modulus increased 35% after heat treatment at 600degreesC in a vacuum while density did not change. Transmission electron microscopy revealed crystallization of tungsten trioxide after the heat treatment. (C) 2003 American Vacuum Society.

引用

页码：2728 / 2731

页数：4

共 12 条

[1] DIRECT ELECTRON-BEAM-INDUCED FORMATION OF NANOMETER-SCALE CARBON STRUCTURES IN STEM .1. NATURE OF LONG-RANGE GROWTH OUTSIDE THE SUBSTRATE [J].

ARISTOV, VV ;

KISLOV, NA ;

KHODOS, II .

MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1992, 3 (04) :313-322

[2] FOCUSED-ION BEAM-INDUCED DEPOSITION OF COPPER [J].

DELLARATTA, AD ;

MELNGAILIS, J ;

THOMPSON, CV .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2195-2199

[3] Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition [J].

Fujita, J ;

Ishida, M ;

Sakamoto, T ;

Ochiai, Y ;

Kaito, T ;

Matsui, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2834-2837

[4] ION-BEAM ASSISTED DEPOSITION OF METAL ORGANIC FILMS USING FOCUSED ION-BEAMS [J].

GAMO, K ;

TAKAKURA, N ;

SAMOTO, N ;

SHIMIZU, R ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L293-L295

[5] Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition [J].

Ishida, M ;

Fujita, J ;

Ochiai, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06) :2784-2787

[6] HIGH-RESOLUTION ELECTRON-BEAM INDUCED DEPOSITION [J].

KOOPS, HWP ;

WEIEL, R ;

KERN, DP ;

BAUM, TH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :477-481

[7] CHARACTERIZATION AND APPLICATION OF MATERIALS GROWN BY ELECTRON-BEAM-INDUCED DEPOSITION [J].

KOOPS, HWP ;

KRETZ, J ;

RUDOLPH, M ;

WEBER, M ;

DAHM, G ;

LEE, KL .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B) :7099-7107

[8] Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition [J].

Matsui, S ;

Kaito, T ;

Fujita, J ;

Komuro, M ;

Kanda, K ;

Haruyama, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :3181-3184

[9] GROWTH OF METALLIC WHISKER CRYSTALS INCORPORATED WITH FIELD ELECTRON-EMISSION [J].

OKUYAMA, F .

APPLIED PHYSICS LETTERS, 1980, 36 (01) :46-47

[10] MECHANISM OF ION-BEAM-INDUCED DEPOSITION OF GOLD [J].

RO, JS ;

THOMPSON, CV ;

MELNGAILIS, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01) :73-77

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