Highly strained very high-power laser diodes with InGaAs QWs

被引:15
作者
Bugge, F [1 ]
Zorn, M [1 ]
Zeimer, U [1 ]
Sharma, T [1 ]
Kissel, H [1 ]
Hülsewede, R [1 ]
Erbert, G [1 ]
Weyers, M [1 ]
机构
[1] Ferdinand Braun Inst Hochstfrequenztech, D-12489 Berlin, Germany
关键词
metalorganic vapor phase epitaxy; quantum wells; InGaA; laser diodes;
D O I
10.1016/S0022-0248(02)02042-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
With the aim of realizing laser diodes in the wavelength range beyond 1100 nm oil GaAs, we have Studied the indium incorporation behaviour into pseudomorphic InGaAs-quantum wells with extremely high indium content grown by metalorganic vapour phase epitaxy. A wide growth temperature range between 490 C and 770 C as well as the dependence on V/III-ratio and strain compensation has been studied. At the maximum In-content of 41%, a photoluminescence wavelength of 1238 nm at room temperature is obtained. Laser diodes with in emission wavelength up to 1206 nm were processed. Structures with a slightly reduced In-content. emitting, at 1120 nm, were processed to broad-area devices (100mum x 1000mum) and show output powers up to 12W, which corresponds to a record high internal power density of 23MW/cm(2), with a good reliability. LOC structures with a reduced far field below 30 and a higher indium content emit 8.5 W at 1170 nm. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:354 / 358
页数:5
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