Stable, solution-processed, high-mobility ZnO thin-film transistors

被引:422
作者
Ong, Beng S.
Li, Chensha
Li, Yuning
Wu, Yiliang
Loutfy, Rafik
机构
[1] Xerox Res Ctr Canada Ltd, Mat Design & Integrat Lab, Mississauga, ON L5K 2L1, Canada
[2] McMaster Univ, Dept Chem Engn, Hamilton, ON L8S 4L7, Canada
关键词
D O I
10.1021/ja068876e
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A stable, high-mobility ZnO thin-film semiconductor was fabricated by thermal treatment of a solution-deposited thin film from a solution of Zn(OAc)(2)/2-ethanolamine in methoxyethanol. This ZnO thin-film semiconductor was composed of closely packed ZnO single crystals (similar to 30 to 50 nm) having a hexagonal structure assuming a preferred orientation with its c-axis perpendicular to the substrate. Field-effect mobility of 5-6 cm(2) V-1 s(-1) and current on-to-off ratio of 10(5)-10(6) were demonstrated with this ZnO thin-film semiconductor in thin-film transistors.
引用
收藏
页码:2750 / +
页数:3
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