Performance of Ge-on-Si p-i-n photodetectors for standard receiver modules

被引:70
作者
Morse, Mike [1 ]
Dosunmu, Olufemi
Sarid, Gadi
Chetrit, Yoel
机构
[1] Intel Corp, Santa Clara, CA 95054 USA
[2] Intel Corp, IL-91031 Jerusalem, Israel
关键词
germanium; photodectectors; receivers;
D O I
10.1109/LPT.2006.885623
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ge on Si p-i-n photodetectors with areas which are compatible with commercially available receivers have been fabricated and tested. A dark current density of 6 mA/cm(2) at -1-V bias has been measured at room temperature; when heated to 85 degrees C, the measured dark current increases by a factor of nine. A responsivity of 0.59 A/W at 850 nm has been measured from these Ge detectors, which matches or exceeds commercially available GaAs devices. We have measured bandwidths approaching 9 GHz at -2-V bias from 50-mu m diameter Ge detectors, and have observed eye diagrams comparable to those obtained from GaAs-based receivers at 4.25 Gb/s.
引用
收藏
页码:2442 / 2444
页数:3
相关论文
共 10 条
[1]   VISIBLE-LIGHT EMISSION DUE TO QUANTUM SIZE EFFECTS IN HIGHLY POROUS CRYSTALLINE SILICON [J].
CULLIS, AG ;
CANHAM, LT .
NATURE, 1991, 353 (6342) :335-338
[2]   Ge-on-Si vertical incidence photodiodes with 39-GHz bandwidth [J].
Jutzi, M ;
Berroth, M ;
Wöhl, G ;
Oehme, M ;
Kasper, E .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (07) :1510-1512
[3]   Detection system for depth profiling of radiotracers [J].
Laitinen, P ;
Tiourine, G ;
Touboltsev, V ;
Räisänen, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 190 :183-185
[4]   High speed silicon Mach-Zehnder modulator [J].
Liao, L ;
Samara-Rubio, D ;
Morse, M ;
Liu, AS ;
Hodge, D ;
Rubin, D ;
Keil, UD ;
Franck, T .
OPTICS EXPRESS, 2005, 13 (08) :3129-3135
[5]   High-performance, tensile-strained Ge p-i-n photodetectors on a Si platform -: art. no. 103501 [J].
Liu, JF ;
Michel, J ;
Giziewicz, W ;
Pan, D ;
Wada, K ;
Cannon, DD ;
Jongthammanurak, S ;
Danielson, DT ;
Kimerling, LC ;
Chen, J ;
Ilday, FÖ ;
Kärtner, FX ;
Yasaitis, J .
APPLIED PHYSICS LETTERS, 2005, 87 (10)
[6]   NEW INFRARED DETECTOR ON A SILICON CHIP [J].
LURYI, S ;
KASTALSKY, A ;
BEAN, JC .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (09) :1135-1139
[7]   DIFFUSION OF GERMANIUM IN SILICON [J].
MCVAY, GL ;
DUCHARME, AR .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (03) :1409-1410
[8]  
Pavesi L, 2005, 2005 2ND IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, P216
[9]   Optical absorption coefficient determination and physical modelling of strained SiGe/Si photodetectors. [J].
Polleux, JL ;
Rumelhard, C .
8TH IEEE INTERNATIONAL SYMPOSIUM ON HIGH PERFORMANCE ELECTRON DEVICES FOR MICROWAVE AND OPTOELECTRONIC APPLICATIONS, 2000, :167-172
[10]   Integration of Si p-i-n diodes for light emitter and detector with optical waveguides [J].
Yamada, A ;
Sakuraba, M ;
Murota, J .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2005, 8 (1-3) :435-438