Influence of doping concentration on the properties of ZnO:Mn thin films by sol-gel method

被引：52

作者：

Chen, Wen

Wang, Jing ^{[1
]}

Wang, Min-rui

机构：

[1] Dalian Univ Technol, Sch Elect & Informat Engn, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116023, Peoples R China

[2] Dalian Univ Technol, MST Res Ctr, Dalian 116023, Peoples R China

来源：

VACUUM | 2007年 / 81卷 / 07期

基金：

中国国家自然科学基金;

关键词：

ZnO thin films; doping concentration; Mn; (002) peaks; resistivity; XPS;

D O I：

10.1016/j.vacuum.2006.10.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of Mn-doped ZnO with different doping concentration (0.8, 1, 3, 5 at%,) were prepared on Pt/Ti/SiO2/Si substrates by using sol-gel method. The effects of the doping concentration on the structural properties, electrical characteristics and element binding energy in films were investigated. X-ray diffraction (XRD) results showed that the c-axis orientation of ZnO films was affected by Mn2+ content. Current-voltage (I-V) measurements indicated that resistivities of ZnO films were observably enhanced by dopant/of Mn2+ and the resistivities value increased with a doping level up to 5 at% Mn. X-ray photoelectron spectroscopy (XPS) patterns suggested that the binding energies of Ols and ZnL3M45M45 were affected by the content of Mn2+. (c) 2006 Elsevier Ltd. All rights reserved.

引用

页码：894 / 898

页数：5

共 26 条

[1] No ferromagnetism in Mn doped ZnO semiconductors [J].

Alaria, J ;

Turek, P ;

Bernard, M ;

Bouloudenine, M ;

Berbadj, A ;

Brihi, N ;

Schmerber, G ;

Colis, S ;

Dinia, A .

CHEMICAL PHYSICS LETTERS, 2005, 415 (4-6) :337-341

[2] Structure and ferromagnetism of Mn+ ion-implanted ZnO thin films on sapphire [J].

Brauer, G ;

Anwand, W ;

Skorupa, W ;

Schmidt, H ;

Diaconu, M ;

Lorenz, M ;

Grundmann, M .

SUPERLATTICES AND MICROSTRUCTURES, 2006, 39 (1-4) :41-49

[3] Nanocrystalline ZnO thin films on porous silicon/silicon substrates obtained by sol-gel technique [J].

Chen, SQ ;

Zhang, J ;

Feng, X ;

Wang, XH ;

Luo, LQ ;

Shi, YL ;

Xue, QS ;

Wang, C ;

Zhu, JZ ;

Zhu, ZQ .

APPLIED SURFACE SCIENCE, 2005, 241 (3-4) :384-391

[4] Electrical and optical studies of ZnO:Ga thin films fabricated via the sol-gel technique [J].

Cheong, KY ;

Muti, N ;

Ramanan, SR .

THIN SOLID FILMS, 2002, 410 (1-2) :142-146

[5] dc and ac transport properties of Mn-doped ZnO thin films grown by pulsed laser ablation [J].

Dhananjay ;

Nagaraju, J. ;

Krupanidhi, S. B. .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 133 (1-3) :70-76

[6] Effects of Li and Mg doping on microstructure and properties of sol-gel ZnO thin films [J].

Fujihara, S ;

Sasaki, C ;

Kimura, T .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2001, 21 (10-11) :2109-2112

[7] Microstructure and optical properties of epitaxial GaN on ZnO (0001) grown by reactive molecular beam epitaxy [J].

Hamdani, F ;

Yeadon, M ;

Smith, DJ ;

Tang, H ;

Kim, W ;

Salvador, A ;

Botchkarev, AE ;

Gibson, JM ;

Polyakov, AY ;

Skowronski, M ;

Morkoc, H .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (02) :983-990

[8] Varistor behaviour of Mn-doped ZnO ceramics [J].

Han, JP ;

Senos, AMR ;

Mantas, PQ .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2002, 22 (9-10) :1653-1660

[9] On the room temperature ferromagnetism of Mn doped ZnO [J].

Jayakumar, O. D. ;

Gopalakrishnan, I. K. ;

Kulshrestha, S. K. .

PHYSICA B-CONDENSED MATTER, 2006, 381 (1-2) :194-198

[10] Characterization of MgxZn1-xO thin films prepared by sol-gel dip coating [J].

Ji, ZG ;

Song, YL ;

Xiang, Y ;

Liu, K ;

Wang, C ;

Ye, ZZ .

JOURNAL OF CRYSTAL GROWTH, 2004, 265 (3-4) :537-540

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