The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

被引：24

作者：

Kitajima, T

Izawa, M

Nakano, N

Makabe, T

机构：

[1] Department of Electrical Engineering, Faculty of Science and Technology, Keio University, Yokohama 223

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1997年 / 30卷 / 12期

关键词：

D O I：

10.1088/0022-3727/30/12/015

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p(5) in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p(5)) in Ar for 13.56 MHz.

引用

收藏

页码：1783 / 1789

页数：7

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