Microstructure of homoepitaxial strontium titanate films grown by pulsed laser deposition

被引：14

作者：

Tse, Y. Y. ^{[1
]}

Koutsonas, Y.

Jackson, T. J.

Passerieux, G.

Jones, I. P.

机构：

[1] Univ Birmingham, Dept Met & Mat, Sch Engn, Birmingham B15 2TT, W Midlands, England

[2] Univ Birmingham, Dept Electron Elect & Comp Engn, Sch Engn, Birmingham B15 2TT, W Midlands, England

来源：

THIN SOLID FILMS | 2006年 / 515卷 / 04期

关键词：

strontium titanate; pulsed laser deposition; transmission electron microscopy; thin film growth;

D O I：

10.1016/j.tsf.2006.06.034

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Homoepitaxial strontium titanate (SrTiO3) thin films have been grown by pulsed laser deposition in order to identify those defects which are intrinsic to the growth of SrTiO3. The pulse rate and oxygen annealing pressure were varied, although the oxygen pressure bad no effect under these conditions. Columnar growth was common. The nature of the columns is described, but the reason for their presence is not fully understood. They can be suppressed using a high laser pulse rate. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1788 / 1795

页数：8

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