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Preparation of epitaxial Pb(Zr,Ti)O-3 thin films on Nb-doped SrTiO3 (100) substrates by dipping-pyrolysis process

被引：41
作者：
Hwang, KS
Manabe, T
Yamaguchi, I
Kumagai, T
Mizuta, S
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 08期
关键词：
PZT thin films; Nb-doped SrTiO3; dipping-pyrolysis process; metal naphthenates; reciprocal-space mapping;
D O I：
10.1143/JJAP.36.5221
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Epitaxially grown Pb(Zr, Ti)O-3 (PZT, Pb: Zr: Ti = 1 : 0.52 : 0.48) thin films were prepared on Nb-doped SrTiO3 (100) substrates by dipping-pyrolysis process with metal naphthenates used as starting materials. The alignments of the films were investigated based on X-ray diffraction (XRD) theta-2 theta scans, beta scans (pole figures); and asymmetric omega-2 theta scans (reciprocal-space maps). Epitaxial films with smooth surfaces were obtained by heat treatment of prefired films at 600 degrees-750 degrees C; a film heat-treated at 750 degrees C showed the strongest peak intensities in the XRD theta-2 theta scans. These PZT films were found by reciprocal-space map analysis to consist of the c-axis-oriented tetragonal phase.
引用
收藏
页码：5221 / 5225
页数：5
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