An analytical single-piece MOSFET substrate current model for circuit simulation is presented. The model, combined with a unified and continuous-channel current model, is valid and continuous through all operating regimes (including weak inversion), for both conventional and LDD MOSFETs. To include the weak avalanche regime the effects of the voltage drop in the substrate resistance have been accounted for in the channel and substrate currents, and in the total charge equations. The accuracy of the model (for currents and their derivatives) has been confirmed by comparison with measurements. The model is very useful for the design of submicron CMOS circuits. Copyright (C) 1996 Elsevier Science Ltd