CAD-guided automated nanoassembly using atomic force microscopy-based nonrobotics

被引:69
作者
Chen, Heping [1 ]
Xi, Ning
Li, Guangyong
机构
[1] ABB Inc, ABB Corp Res, Robot & Automat Labs, Windsor, CT 06095 USA
[2] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48824 USA
基金
美国国家科学基金会;
关键词
atomic force microscope (AFM); computer-aided design (CAD); drift compensation; nanoassembly; nanomanipulation; nanomanufacturing;
D O I
10.1109/TASE.2006.876907
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Nanoassembly using atomic force microscopy (AFM) is a promising technique for nanomanufacturing. Most AFM-based nanoassembly schemes are implemented either manually using haptic devices or in an interactive way between the users and the atomic force microscope images. These schemes are time consuming and inefficient. Therefore, the computer-aided design (CAD)-guided automated nanoassembly using AFM is desirable for nanomanufacturing. In this paper, a general framework for CAD-guided automated nanoassembly using AFM is developed. Based on the CAD model of a nanostructure, the manipulation paths for both nanoparticles and nanorods are generated automatically. A local scanning method is developed to compensate for the random drift that may cause the failure of the nanoassembly. The experimental results demonstrate that the developed general framework can be employed to manufacture nanostructures efficiently. The research work opens a door to the CAD-guided automated nanomanufacturing using AFM.
引用
收藏
页码:208 / 217
页数:10
相关论文
共 22 条
[11]   CONTROLLED MANIPULATION OF NANOPARTICLES WITH AN ATOMIC-FORCE MICROSCOPE [J].
JUNNO, T ;
DEPPERT, K ;
MONTELIUS, L ;
SAMUELSON, L .
APPLIED PHYSICS LETTERS, 1995, 66 (26) :3627-3629
[12]  
Li GY, 2004, IEEE INT CONF ROBOT, P428
[13]   Development of augmented reality system for AFM-based nanomanipulation [J].
Li, GY ;
Xi, N ;
Yu, MM ;
Fung, WK .
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2004, 9 (02) :358-365
[14]  
LI GY, 2003, P IEEE RSJ INT C INT
[15]  
LI GY, 2003, P IEEE INT C ROB AUT
[16]   Automatic planning of nanoparticle assembly tasks [J].
Makaliwe, JH ;
Requicha, AAG .
PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL SYMPOSIUM ON ASSEMBLY AND TASK PLANNING (ISATP2001): ASSEMBLY AND DISASSEMBLY IN THE TWENTY-FIRST CENTURY, 2001, :288-293
[17]   Towards automatic nanomanipulation: Drift compensation in scanning probe microscopes [J].
Mokaberi, B ;
Requicha, AAG .
2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS, 2004, :416-421
[18]   Modification of a shallow 2DEG by AFM lithography [J].
Nemutudi, R ;
Curson, NJ ;
Appleyard, NJ ;
Ritchie, DA ;
Jones, GAC .
MICROELECTRONIC ENGINEERING, 2001, 57-8 :967-973
[19]  
Requicha AAG, 1998, IEEE INT CONF ROBOT, P3368, DOI 10.1109/ROBOT.1998.680958
[20]   FABRICATION OF 2-DIMENSIONAL ARRAYS OF NANOMETER-SIZE CLUSTERS WITH THE ATOMIC-FORCE MICROSCOPE [J].
SCHAEFER, DM ;
REIFENBERGER, R ;
PATIL, A ;
ANDRES, RP .
APPLIED PHYSICS LETTERS, 1995, 66 (08) :1012-1014