Photo-decomposition of thin palladium acetate films with 126 nm radiation

被引：35

作者：

Zhang, JY

Boyd, IW

机构：

[1] Department of Electronic and Electrical Engineering, University College London, London WC1E 7JE, Torrington Place

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1997年 / 65卷 / 4-5期

关键词：

D O I：

10.1007/s003390050595

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin palladium films on quartz, Al2O3, AlN and Si substrates produced by vacuum ultraviolet induced decomposition of palladium acetate is described. The palladium films formed and the palladium acetate layers used were characterised by using ultraviolet spectrophotometry and Fourier transform infrared (FTIR) spectroscopy. The optical transmission of the films after irradiation with pseudo-continuous 126 nm radiation generated by an excimer lamp provided information about the decomposition rate at different pressures and exposure times. The FTIR spectra recorded the chemical changes of the C = O, COO- and CH3 groups at different exposure times. The decomposition mechanism of the palladium acetate under these conditions appears to be quite different to that induced by pulsed laser irradiation.

引用

页码：379 / 382

页数：4

共 22 条

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