Radio-frequency plasma production using a ladder-shaped antenna

被引：12

作者：

Kawai, Y

Yoshioka, M

Yamane, T

Takeuchi, Y ^{[1
]}

Murata, M

机构：

[1] Mitsubishi Heavy Ind Ltd, Nagasaki Res & Dev Ctr, Nagasaki 8510392, Japan

[2] Kyushu Univ, Sch Engn Sci, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 8168580, Japan

来源：

SURFACE & COATINGS TECHNOLOGY | 1999年 / 116卷

关键词：

ladder-shaped antenna; Langmuir probe; plasma CVD; plasma parameter; VHF plasma;

D O I：

10.1016/S0257-8972(99)00295-9

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A VHF plasma was produced with a ladder-shaped antenna whose driving frequency ranges up to 200 MHz and the plasma parameters were measured with a movable Langmuir probe. A very uniform plasma was achieved over 300 mm x 300 mm with a driving frequency of 80 MHz. When the driving frequency was increased, the plasma density increased, amounting to 1.6 x 10(10) cm(-3) at 200 MHz near the substrate, and the electron temperature decreased. (C) 1999 Published by Elsevier Science S.A. All rights reserved.

引用

页码：662 / 665

页数：4

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