Degradation of superhard nanocomposites by built-in impurities

被引：42

作者：

Veprek, S

Männling, HD

Niederhofer, A

Ma, D

Mukherjee, S

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China

[2] Bhabha Atom Res Ctr, Bombay 400085, Maharashtra, India

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 02期

关键词：

D O I：

10.1116/1.1689305

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Impurities such as oxygen and chlorine can strongly decrease the hardness of superhard nc-TiN/a-Si3N4 and similar nanocomposites when incorporated into the coatings during their deposition. It is shown that 1-1.5 at. % of oxygen causes a hardness decrease to about 30 GPa, as compared to 45-55 GPa for the pure material. This may explain some of the contradictory results found by other authors, particularly for coatings deposited by physical vapor deposition at relatively low nitrogen pressure, deposition temperature, and deposition rates. (C) 2004 American Vacuum Society.

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页码：L5 / L9

页数：5

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