Experimental and simulated estimation of new super resolution technique

被引：4

作者：

Kamon, K

Matsui, Y

机构：

[1] ULSI Laboratory, Mitsubishi Electric Corporation, Itami 664

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 06期

关键词：

D O I：

10.1116/1.588614

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to support next-generation devices, a super resolution technique having wide applicability and effective resolution enhancement has been proposed and some simulation results were demonstrated. It has been experimentally proven that the depth of focus of the new optics is 1.5 times wider than the modified illumination, which shows good agreement to previous simulation results. From the evaluation of the mask stage repeatability, 0.1 mu m (on mask) alignment accuracy or lens distortion between the first and second mask is acceptable for the new optics. (C) 1996 American Vacuum Society.

引用

页码：4171 / 4174

页数：4

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