Origins of defects in self assembled GaP islands grown on Si(001) and Si(111)

被引:10
作者
Narayanan, V [1 ]
Sukidi, N
Bachmann, KJ
Mahajan, S
机构
[1] Arizona State Univ, Dept Chem Bio & Mat Engn, Tempe, AZ 85287 USA
[2] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
关键词
GaP islands; Si substrates; defects; high resolution transmission electron microscopy;
D O I
10.1016/S0040-6090(99)00474-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Microstructures of GaP epitaxial islands grown on Si(001) and Si(111) by chemical beam epitaxy have been investigated by transmission electron microscopy (TEM). Results indicate that planar-defect free GaP islands of sizes <20 nn can be produced at 560 degrees C on Si(001). Some of the islands are faceted on {111} and {113} planes. Subsequent planar defect formation occurs due to stacking errors on the smaller {111} facets of GaP islands that may be P-terminated. These stacking errors are attributed to the low surface mobility on P-terminated facets. A high density of planar defects is observed in smaller islands grown on Si(001) at 420 degrees C, a consequence of reduced atomic mobility at low temperatures that leads to {111} stacking errors. Wurtzite GaP has been observed to coexist with the zinc-blende polytype in some of the islands grown on Si(111) at 560 degrees C. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:53 / 56
页数:4
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