Advances in scanning force microscopy for dimensional metrology

被引：112

作者：

Danzebrink, H. -U. ^{[1
]}

Koenders, L.

Wilkening, G.

Yacoot, A.

Kunzmann, H.

机构：

[1] Phys Tech Bundesanstalt Braunschweig & Berlin, Braunschweig, Germany

[2] Natl Phys Lab, Teddington TW11 0LW, Middx, England

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2006年 / 55卷 / 02期

关键词：

scanning probe microscope; dimensional; metrology;

D O I：

10.1016/j.cirp.2006.10.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents the state of the art in scanning force microscopy for dimensional metrology. A detailed description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to improve calibration procedures, traceability, reduce measurement uncertainty, ensure consistancy of measurement and broaden the range of applications are described.

引用

页码：841 / 878

页数：38

共 277 条

[1] EFFECT OF TIP PROFILE ON ATOMIC-FORCE MICROSCOPE IMAGES - A MODEL STUDY [J].

ABRAHAM, FF ;

BATRA, IP ;

CIRACI, S .

PHYSICAL REVIEW LETTERS, 1988, 60 (13) :1314-1317

[2]

ABRAHAM FF, 1989, SURF SCI, V210, pL177

[3] IMPROVED ATOMIC FORCE MICROSCOPE IMAGES USING MICROCANTILEVERS WITH SHARP TIPS [J].

AKAMINE, S ;

BARRETT, RC ;

QUATE, CF .

APPLIED PHYSICS LETTERS, 1990, 57 (03) :316-318

[4] Real-time atomic encoder using scanning tunnelling microscope and regular crystalline surface [J].

Aketagawa, M ;

Takada, K ;

Rerkkumsup, P ;

Togawa, Y ;

Honda, H .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2006, 17 (03) :513-518

[5] Long atomic imaging over a 5-μm-long region using an ultralow thermally drifted dual-tunneling-unit scanning tunneling microscope in a thermostabilized cell [J].

Aketagawa, M ;

Takada, K ;

Takeshima, N ;

Yamada, K ;

Lee, JD .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (01) :133-136

[6] Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy [J].

Akiyama, T ;

Staufer, U ;

de Rooij, NF ;

Frederix, P ;

Engel, A .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2003, 74 (01) :112-117

[7] Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics [J].

Akiyama, T ;

Staufer, U ;

de Rooij, NF ;

Lange, D ;

Hagleitner, C ;

Brand, O ;

Baltes, H ;

Tonin, A ;

Hidber, HR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :2669-2675

[8] MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE [J].

ALBRECHT, TR ;

AKAMINE, S ;

CARVER, TE ;

QUATE, CF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3386-3396

[9] FREQUENCY-MODULATION DETECTION USING HIGH-Q CANTILEVERS FOR ENHANCED FORCE MICROSCOPE SENSITIVITY [J].

ALBRECHT, TR ;

GRUTTER, P ;

HORNE, D ;

RUGAR, D .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :668-673

[10] AN ATOMIC-RESOLUTION ATOMIC-FORCE MICROSCOPE IMPLEMENTED USING AN OPTICAL-LEVER [J].

ALEXANDER, S ;

HELLEMANS, L ;

MARTI, O ;

SCHNEIR, J ;

ELINGS, V ;

HANSMA, PK ;

LONGMIRE, M ;

GURLEY, J .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :164-167

← 1 2 3 4 5 6 7 8 9 10 →