Reduced critical thickness and photoluminescence line splitting in multiple layers of self-assembled Ge/Si islands

被引:9
作者
Schmidt, OG
Eberl, K
Kienzle, O
Ernst, F
Christiansen, S
Strunk, HP
机构
[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
[2] Max Planck Inst Met Res, D-70174 Stuttgart, Germany
[3] Univ Erlangen Nurnberg, Inst Werkstoffwissenschaften, D-91058 Erlangen, Germany
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2000年 / 74卷 / 1-3期
关键词
critical thickness; photoluminescence; germanium island lagers; silicon; transmission electron microscopy;
D O I
10.1016/S0921-5107(99)00570-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a transmission electron microscopy and photoluminescence (PL) study of stacked Ge island layers embedded in Si. We systematically varied the thickness t(s) of the Si interlayer and the number of island layers to explore the effect of the interlayer thickness on the growth of Ge islands. For sufficiently thin t(s), the Ge islands align in a vertical direction. Analytic transmission electron microscopy reveals that, in the regime of vertical island alignment, the wetting layer (WL) thicknesses decrease in upper Ge layers, This effect is explained by a reduced critical thickness for island nucleation caused by the strain fields of buried islands. At the same time, PL experiments show that the WL energy transition is split into multiple lines, as would be expected due to the different WL thicknesses. The line splitting is dependent on the intermediate Si spacer thickness, reflecting the degree of strain field interaction between the stacked layers. The island-related optical transition is blue-shifted with increasing number of island layers. We attribute this effect to enhanced material intermixing in the second and proceeding island layers. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:248 / 252
页数:5
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