Fabrication of nanometric zinc pattern with photodissociated gas-phase diethylzinc by optical near field

被引:55
作者
Yamamoto, Y
Kourogi, M
Ohtsu, M
Polonski, V
Lee, GH
机构
[1] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, Yokohama, Kanagawa 2268502, Japan
[2] Japan Sci & Technol Corp, Tokyo 1940004, Japan
关键词
D O I
10.1063/1.126288
中图分类号
O59 [应用物理学];
学科分类号
摘要
In situ patterning of zinc on a nanometric scale has been accomplished by photodissociation of gas-phase diethylzinc by optical near field. By using an ultraviolet optical fiber probe with an aperture diameter of 60 nm, dots with full width at half maxima of 60 and 70 nm were deposited, and were separated by 100 nm. The aspect ratio of the dots increased at the rate of 0.03/mu J, as the optical near field energy increased. A T-shape pattern was also fabricated by scanning the probe in an optical near field microscope system. (C) 2000 American Institute of Physics. [S0003-6951(00)04616-7].
引用
收藏
页码:2173 / 2175
页数:3
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