Metastable Ti1-xAlxN films with different Al content

被引：55

作者：

Kimura, A ^{[1
]}

Hasegawa, H ^{[1
]}

Yamada, K ^{[1
]}

Suzuki, T ^{[1
]}

机构：

[1] Keio Univ, Dept Mech Engn, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 2000年 / 19卷 / 07期

关键词：

D O I：

10.1023/A:1006738514096

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The maximum solubility of Al in the Bl-NaCl structure of Ti1-xAlxN films synthesized by the arc ion plating (AIP) method was studied by the X-ray diffraction method using nine kinds of Ti1-xAlx alloy targets with different Al content. Further, the drastic microstructural changes around critical range of Al content were observed by scanning electron microscopy. The resulting data was analyzed.

引用

页码：601 / 602

页数：2

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