Optical properties of pulsed laser deposited ZnO thin films

被引：58

作者：

Hu, WS ^{[1
]}

Liu, ZG ^{[1
]}

Sun, J ^{[1
]}

Zhu, SN ^{[1
]}

Xu, QQ ^{[1
]}

Feng, D ^{[1
]}

Ji, ZM ^{[1
]}

机构：

[1] NANJING UNIV,DEPT ELECT SCI & ENGN,NANJING 210093,PEOPLES R CHINA

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 1997年 / 58卷 / 06期

基金：

中国国家自然科学基金;

关键词：

optical materials; thin films; vapour deposition; X-ray diffraction; optical properties;

D O I：

10.1016/S0022-3697(96)00224-7

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

With the help of the pulsed laser deposition technique, completely (001) textured ZnO thin films were achieved on (001) alpha-SiO2 single crystalline substrates at moderate substrate temperatures of 225-500 degrees C. The films exhibited oscillated optical transmittance, from which the refractive indices vs the wavelength were calculated and fitted in Cauchy's equation. The index dispersion showed the same tendency as that of the bulk ZnO crystal. By the prism-film coupling method a wave of 0.633 mu m was well guided in the films. The m-lines for both TE and TM multimodes were sharp and clear. Light propagation lines were observed within the films and the propagation loss was determined to 2.8 dB/cm. Waveguide equations suiting the anisotropic waveguide structures were derived to determine the ordinary and extraordinary refractive indices. Values of n(o) = 1.96 and n(c) = 1.98 were much closer to that of: the bulk crystal. The as-deposited films were of high quality in crystallinity and optical properties. (C) 1997? Elsevier Science Ltd.

引用

页码：853 / 857

页数：5

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