ATOMIC LAYER EPITAXY GROWTH OF DOPED ZINC-OXIDE THIN-FILMS FROM ORGANOMETALS

被引：174

作者：

LUJALA, V

SKARP, J

TAMMENMAA, M

SUNTOLA, T

机构：

[1] Microchemistry Ltd., FIN-02151 Espoo

来源：

APPLIED SURFACE SCIENCE | 1994年 / 82-3卷

关键词：

D O I：

10.1016/0169-4332(94)90192-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An atomic layer epitaxy process for growing Al-doped ZnO thin films is presented. Organometallic precursors of zinc and aluminum were used to react with water at substrate temperatures of 120-350-degrees-C. Growth rate varied from 0.5 to 2.5 angstrom/cycle, depending on precursors and substrate temperatures used. With optimum doping, sheet resistances of 10 OMEGA/DELTA with 1 mum thick films were obtained.

引用

页码：34 / 40

页数：7

共 13 条

[1] TEMPERATURE EFFECTS ON THE ELECTRICAL-PROPERTIES OF ZNO THIN-FILMS PREPARED BY THE PYROSOL PROCESS
AMBIA, MG
ISLAM, MN
HAKIM, MO
[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1992, 28 (02) : 103 - 111
[2] TEXTURED ALUMINUM-DOPED ZINC-OXIDE THIN-FILMS FROM ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR DEPOSITION
HU, JH
GORDON, RG
[J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (02) : 880 - 890
[3] THE PREPARATION OF TRANSPARENT ZONAL THIN-FILMS
KONISHI, R
NODA, K
HARADA, H
SASAKURA, H
[J]. JOURNAL OF CRYSTAL GROWTH, 1992, 117 (1-4) : 939 - 942
[4] PROPERTIES OF RF-SPUTTERED ZINC-OXIDE BASED THIN-FILMS MADE FROM DIFFERENT TARGETS
MARTINEZ, MA
HERRERO, J
GUTIERREZ, MT
[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1994, 31 (04) : 489 - 498
[5] ZINC-OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION FROM ZINC ACETATE
MARUYAMA, T
SHIONOYA, J
[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1992, 11 (03) : 170 - 172
[6] LARGE-AREA MILKY TRANSPARENT CONDUCTING AL-DOPED ZNO FILMS PREPARED BY MAGNETRON SPUTTERING
MINAMI, T
SATO, H
TAKATA, S
OGAWA, N
MOURI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (8A): : L1106 - L1109
[7] PREPARATION OF ALUMINUM-DOPED ZINC-OXIDE FILMS BY A NORMAL-PRESSURE CVD METHOD
NISHINO, J
OHSHIO, S
KAMATA, K
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1992, 75 (12) : 3469 - 3472
[8] HIGHLY CONDUCTIVE AND TRANSPARENT ZONAL THIN-FILMS PREPARED ON HIGH-TEMPERATURE SUBSTRATES BY DC MAGNETRON SPUTTERING
SATO, H
MINAMI, T
TAKATA, S
MOURI, T
OGAWA, N
[J]. THIN SOLID FILMS, 1992, 220 (1-2) : 327 - 332
[9] ZINC CHALCOGENIDE THIN-FILMS GROWN BY THE ATOMIC LAYER EPITAXY TECHNIQUE USING ZINC ACETATE AS SOURCE MATERIAL
TAMMENMAA, M
KOSKINEN, T
HILTUNEN, L
NIINISTO, L
LESKELA, M
[J]. THIN SOLID FILMS, 1985, 124 (02) : 125 - 128
[10] ELECTRICAL AND OPTICAL-PROPERTIES OF BORON-DOPED ZNO THIN-FILMS FOR SOLAR-CELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
WENAS, WW
YAMADA, A
TAKAHASHI, K
YOSHINO, M
KONAGAI, M
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (11) : 7119 - 7123

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