Recent advances in FIB-TEM specimen preparation techniques

被引：144

作者：

Li, Jian ^{[1
]}

Malis, T. ^{[1
]}

Dionne, S. ^{[1
]}

机构：

[1] Natl Res Council Canada, Mat Technol Lab, Ottawa, ON K1A 0G1, Canada

来源：

MATERIALS CHARACTERIZATION | 2006年 / 57卷 / 01期

关键词：

focused ion beam; lift-out; transmission electron microscope;

D O I：

10.1016/j.matchar.2005.12.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Preparing high-quality transmission electron microscopy (TEM) specimens is of paramount importance in TEM studies. The development of the focused ion beam (FIB) microscope has greatly enhanced TEM specimen preparation capabilities. In recent years, various FIB-TEM foil preparation techniques have been developed. However, the currently available techniques fail to produce TEM specimens from fragile and ultra-fine specimens such as fine fibers. In this paper, the conventional FIB-TEM specimen preparation techniques are reviewed, and their advantages and shortcomings are compared. In addition, a new technique suitable to prepare TEM samples from ultra-fine specimens is demonstrated. (c) 2006 Elsevier Inc. All rights reserved.

引用

页码：64 / 70

页数：7

共 15 条

[1] Combined tripod polishing and fib method for preparing semiconductor plan view specimens [J].

Anderson, R ;

Klepeis, SJ .

SPECIMEN PREPARATION FOR TRANSMISSION ELECTRON MICROSCOPY OF MATERIALS IV, 1997, 480 :187-192

[2]

ANDERSON R, 2002, COMP FIB TEM SPECIME, P44

[3] Preparation of transmission electron microscope specimens from FeAl and WC powders using focused-ion beam milling [J].

Cairney, JM ;

Munroe, PR .

MATERIALS CHARACTERIZATION, 2001, 46 (04) :297-304

[4]

ELBOUJDAINI M, 2004, NACE INT C CORR 2004

[5] Site-specific specimen preparation by focused ion beam milling for transmission electron microscopy of metal matrix composites [J].

Gasser, P ;

Klotz, UE ;

Khalid, FA ;

Beffort, O .

MICROSCOPY AND MICROANALYSIS, 2004, 10 (02) :311-316

[6] A review of focused ion beam milling techniques for TEM specimen preparation [J].

Giannuzzi, LA ;

Stevie, FA .

MICRON, 1999, 30 (03) :197-204

[7]

JIAN L, 2004, AEROSPACE MAT MANUFA, P515

[8]

Langford R., 2002, MICROSC MICROANAL, V8, P46, DOI [10.1017/S1431927602101553, DOI 10.1017/S1431927602101553]

[9]

LI J, 2003, P MICROSCOPY MICROAN

[10] Development of a focused ion beam (FIB) technique to minimize X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) of FIB specimens in the transmission electron microscope (TEM) [J].

Longo, DM ;

Howe, JM ;

Johnson, WC .

ULTRAMICROSCOPY, 1999, 80 (02) :69-84

← 1 2 →